Corrosion Resistance of TiN Coating Deposited on Quartz by RF Plasma-Assisted CVD

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ژورنال

عنوان ژورنال: Zairyo-to-Kankyo

سال: 1992

ISSN: 0917-0480,1881-9664

DOI: 10.3323/jcorr1991.41.734